Process engineering analysis in semiconductor device fabrication /
Middleman, Stanley.
Process engineering analysis in semiconductor device fabrication / Stanley Middleman, Arthur K. Hochberg. - New York : McGraw-Hill, c1993. - xvii, 774 p. : ill. ; 25 cm. - McGraw-Hill chemical engineering series .
Includes bibliographical references and index.
0070418535
92016442
Semiconductors--Design and construction.
TK 7871.85 / M52 1993
621.3815/2
Process engineering analysis in semiconductor device fabrication / Stanley Middleman, Arthur K. Hochberg. - New York : McGraw-Hill, c1993. - xvii, 774 p. : ill. ; 25 cm. - McGraw-Hill chemical engineering series .
Includes bibliographical references and index.
0070418535
92016442
Semiconductors--Design and construction.
TK 7871.85 / M52 1993
621.3815/2