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Microelectromechanical systems : advanced technologies and devices /

Microelectromechanical systems : advanced technologies and devices / Edited by Eve Versuh. - vii, 274 pages : color illustrations ; 29 cm.

Includes bibliographical references.

ISBN: 9781682853207 (hardbound)

Subjects--Topical Terms:
Microelectromechanical systems.
Microelectromechanical systems--Design and construction.
Electromechanical devices.
Microtechnology.

LC Class. No.: TK 7875 / M53 2016

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