Middleman, Stanley. <br/><br/>
Process engineering analysis in semiconductor device fabrication / 
Stanley Middleman, Arthur K. Hochberg. 
 - New York :  McGraw-Hill,  c1993. 
 - xvii, 774 p. :  ill. ;  25 cm. 
 - McGraw-Hill chemical engineering series .
<br/><br/>Includes bibliographical references and index. 
<br/><br/><label>ISBN: </label>0070418535 
<br/><br/><label>LCCN: </label>92016442  
<br/><br/><label>Subjects--Topical Terms: </label><br/>Semiconductors--Design and construction.
<br/><br/><label>LC Class. No.: </label>TK 7871.85  / M52 1993 
<br/><br/><label>Dewey Class. No.: </label>621.3815/2