Semiconductor manufacturing handbook / 
[edited by] Hwaiyu Geng. 
 - Second edition. 
 - xxxi, 525 pages :  illustrations ;  26 cm. 
<br/><br/>Includes bibliographical references and index. 
<br/><br/><label>ISBN: </label>9781259587696 (hardbound) 125958769X 1259583120 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Semiconductors--Design and construction--Handbooks, manuals, etc.<br/>Integrated circuits--Design and construction--Handbooks, manuals, etc.
<br/><br/><label>LC Class. No.: </label>R TK   / 7871.85 S46 2018