Microelectromechanical systems :  advanced technologies and devices / 
Edited by Eve Versuh. 
 - vii, 274 pages :  color illustrations ;  29 cm. 
<br/><br/>Includes bibliographical references. 
<br/><br/><label>ISBN: </label>9781682853207 (hardbound) 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems.<br/>Microelectromechanical systems--Design and construction.<br/>Electromechanical devices.<br/>Microtechnology.
<br/><br/><label>LC Class. No.: </label>TK 7875  / M53 2016