000 01299pam a2200337 a 4500
001 47DA4846D76C4122B99C625F6D067887
003 OSt
005 20240709152802.0
008 920430s1993 nyua b 001 0 eng
010 _a 92016442
020 _a0070418535
035 _a4868571
040 _aDLC
_cDLC
_dDLC
050 0 _aTK 7871.85
_bM52 1993
082 0 _a621.3815/2
_220
100 1 _aMiddleman, Stanley.
245 0 0 _aProcess engineering analysis in semiconductor device fabrication /
_cStanley Middleman, Arthur K. Hochberg.
260 _aNew York :
_bMcGraw-Hill,
_cc1993.
300 _axvii, 774 p. :
_bill. ;
_c25 cm.
440 0 _aMcGraw-Hill chemical engineering series
504 _aIncludes bibliographical references and index.
650 1 0 _aSemiconductors
_xDesign and construction.
700 1 _aHochberg, Arthur K.
906 _a7
_bcbc
_corignew
_d1
_eocip
_f19
_gy-gencatlg
942 _2lcc
_cBK
999 _c1271
_d1271