| 000 | 00977nam a2200289 i 4500 | ||
|---|---|---|---|
| 003 | OSt | ||
| 005 | 20240805113220.0 | ||
| 007 | ta | ||
| 008 | 220516s2017 nyua b 001 0 eng d | ||
| 020 | _a9781259587696 (hardbound) | ||
| 020 | _a125958769X | ||
| 020 | _a1259583120 | ||
| 040 |
_aTUPM _beng _erda _cTUP-M |
||
| 050 | 0 |
_aR TK _b7871.85 S46 2018 |
|
| 245 | 0 | 0 |
_aSemiconductor manufacturing handbook / _c[edited by] Hwaiyu Geng. |
| 250 | _aSecond edition. | ||
| 264 | 1 |
_aNew York, NY : _bMcGraw-Hill Education, _c2018. |
|
| 300 |
_axxxi, 525 pages : _billustrations ; _c26 cm. |
||
| 336 |
_atext _2rdacontent. |
||
| 337 |
_aunmediated _2rdamedia. |
||
| 338 |
_avolume _2rdacarrier. |
||
| 504 | _aIncludes bibliographical references and index. | ||
| 650 | 1 | 0 |
_aSemiconductors _xDesign and construction _vHandbooks, manuals, etc. |
| 650 | 1 | 0 |
_aIntegrated circuits _xDesign and construction _vHandbooks, manuals, etc. |
| 700 | 1 |
_aGeng, Hwaiyu, _eeditor. |
|
| 942 |
_2lcc _cBK |
||
| 999 |
_c2277 _d2277 |
||